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Microelectromechanical Systems
講師：
Dr. Sheng-Shian Li
課程時長：
135 分鐘
課程單元：
3
語言：
en
Lesson 1: Introduction to MEMS Fabrication TechnologyLesson 2: Capacitive Sensors and Actuators Lesson 3: Piezoelectric Sensors and Actuators
Introduction to MEMS Fabrication Technology
34:48
Capacitive Sensors and Actuators
50:09
Piezoelectric Sensors and Actuators
