Semiconductor Technology
/
Microelectromechanical Systems
Microelectromechanical Systems
Speaker：
Dr. Sheng-Shian Li
Duration：
135 mins
Lectures：
3
Language：
English
Course Description
Lesson 1: Introduction to MEMS Fabrication Technology
Lesson 2: Capacitive Sensors and Actuators
Lesson 3: Piezoelectric Sensors and Actuators
Curriculum
34:48
50:09
50:09