/
Microelectromechanical Systems
Speaker：
Dr. Sheng-Shian Li
Duration：
135 mins
Lectures：
3
Language：
en
Lesson 1: Introduction to MEMS Fabrication TechnologyLesson 2: Capacitive Sensors and Actuators Lesson 3: Piezoelectric Sensors and Actuators
Introduction to MEMS Fabrication Technology
34:48
Capacitive Sensors and Actuators
50:09
Piezoelectric Sensors and Actuators
