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Microelectromechanical Systems
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Semiconductor Technology

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Microelectromechanical Systems

Microelectromechanical Systems

Speaker：

Dr. Sheng-Shian Li

Duration：

135 mins

Lectures：

3

Language：

en

Course Description

Lesson 1: Introduction to MEMS Fabrication Technology

Lesson 2: Capacitive Sensors and Actuators 

Lesson 3: Piezoelectric Sensors and Actuators 

Curriculum

    • 34:48

    • 50:09

    • 50:09

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Industrial Development Administration, Ministry of Economic AffairsIndustrial Development Administration, Ministry of Economic Affairs, Intelligent Electronics Institute
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02-2705-2050

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